Share Email Print

Proceedings Paper

Optical MEMS-based arrays
Author(s): Paul B. Ruffin
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

Industrial Micro Electro Mechanical Systems (MEMS) developers are rapidly bringing to demonstration inertial radio frequency, and optical MEMS devices and components. The Army has a requirement for compact, highly reliable, and inexpensive laser beam steering components for missile seekers and unmanned aerial vehicles remote sensing components to provide a fast scanning capability for pointing, acquisition, tracking, and data communication. The coupling of this requirement with recent developments in the micro-optics area, has led scientists and engineers at the Army Aviation and Missile Command (AMCOM) to consider optical MEMS-based phased arrays, which have potential applications in the commercial industry as well as in the military, as a replacement for gimbals. Laser beam steering in commercial applications such as free space communicataion, scanning display, bar-code reading, and gimbaled seekers; require relatively large monolithic micro-mirrors to accomplish the required optical resolution. The Army will benefit from phased arrays composed of relatively small micro-mirrors that can be actuated through large deflection angles with substantially reduced volume times. The AMCOM Aviation and Missile Research, Development, and Engineering Center (AMRDEC) has initiated a research project to develop MEMS-based phased arrays for use in a small volume, inexpensive Laser Detection and Ranging (LADAR) seeker that is particularly attractive because of its ability to provide large field-of-regard and autonomous target acquisition for reconnaissance mission applications. The primary objective of the collaborative project with the Defence Advanced Research Projects Agency (DARPA) is to develop a rugged, MEMS-based phased arrays for incorporation into the 2-D scanner of a LADAR seeker. Design challenges and approach to achieving performance requirements will be discussed.

Paper Details

Date Published: 22 July 2003
PDF: 12 pages
Proc. SPIE 5055, Smart Structures and Materials 2003: Smart Electronics, MEMS, BioMEMS, and Nanotechnology, (22 July 2003); doi: 10.1117/12.497452
Show Author Affiliations
Paul B. Ruffin, U.S. Army Aviation and Missile Command (United States)

Published in SPIE Proceedings Vol. 5055:
Smart Structures and Materials 2003: Smart Electronics, MEMS, BioMEMS, and Nanotechnology
Vijay K. Varadan; Laszlo B. Kish, Editor(s)

© SPIE. Terms of Use
Back to Top