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Proceedings Paper

Manufacturing and applications of polymer and ceramic MEMS from a novel material process for harsh environments
Author(s): Li-Anne Liew; Rishi Raj
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Paper Abstract

This paper summarizes very recent developments in the MEMS application of a novel material-class, manufactured by new processing methods. This technology has two unique aspects: (1) The materials form a continuum from high temperature polymers to ultrahigh temperature ceramics. We call them polymer-derived-ceramics (PDCs). In addition to being mechanically robust and chemically inert, the PDCs can be functionalized to embody electronic, optical and magnetic properties. (2) PDC-MEMS are processed from liquid precursors by a simple UV photolithographic photo-curing process. Multilayer structures can be made by stereo lithography or by simple bonding of the polymer structures. The PDC-MEMS technology will be demonstrated by two examples: an optical grating made from the transparent polymer version of the PDC, and a microigniter operating at 1300-1500°C made from the ceramic version. A special feature of the Colorado work is the development of a real-time human-machine-interface (HMI) along-side the design and testing of the MEMS devices. For example, a live HMI for the microigniter gives information such as tip temperature, remaining life and damage accumulation. Finally, the PDC-MEMS technology is inexpensive.

Paper Details

Date Published: 22 July 2003
PDF: 13 pages
Proc. SPIE 5055, Smart Structures and Materials 2003: Smart Electronics, MEMS, BioMEMS, and Nanotechnology, (22 July 2003); doi: 10.1117/12.497447
Show Author Affiliations
Li-Anne Liew, Univ. of Colorado, Boulder (United States)
Rishi Raj, Univ. of Colorado, Boulder (United States)

Published in SPIE Proceedings Vol. 5055:
Smart Structures and Materials 2003: Smart Electronics, MEMS, BioMEMS, and Nanotechnology
Vijay K. Varadan; Laszlo B. Kish, Editor(s)

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