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Proceedings Paper

Nanoparticle films made by gas phase synthesis: comparison of various techniques and sensor applications
Author(s): Peter Heszler; L. F. Reyes; Anders Hoel; Lars Landstrom; V. Lantto; Claes-Goran Granqvist
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Paper Abstract

Nanoparticles can be generated by several different gas phase methods, such as gas deposition, laser-assisted chemical vapor deposition, and laser ablation. Some of the most important aspects - such as size-distribution, structure, and chemical composition of the generated nanoparticles (specifically W and WO3) - are presented and compared. WO3 nanoparticle films were deposited by an advanced gas deposition technique and were tested for sensor applications. Two different sensor devices were fabricated: Firstly, a thin Au-WO3 nanoparticle sandwich film was constructed, and conductance fluctuations of the Au film were measured as the sensor was exposed to alcohol vapor. Secondly, conductivity changes of a thick WO3 nanoparticle film were detected as it was exposed to test gases (H2S, NO2, and CO).

Paper Details

Date Published: 22 July 2003
PDF: 14 pages
Proc. SPIE 5055, Smart Structures and Materials 2003: Smart Electronics, MEMS, BioMEMS, and Nanotechnology, (22 July 2003); doi: 10.1117/12.497440
Show Author Affiliations
Peter Heszler, Uppsala Univ. (Sweden)
L. F. Reyes, Uppsala Univ. (Sweden)
Anders Hoel, Uppsala Univ. (Sweden)
Lars Landstrom, Uppsala Univ. (Sweden)
V. Lantto, Univ. of Oulu (Finland)
Claes-Goran Granqvist, Uppsala Univ. (Sweden)


Published in SPIE Proceedings Vol. 5055:
Smart Structures and Materials 2003: Smart Electronics, MEMS, BioMEMS, and Nanotechnology
Vijay K. Varadan; Laszlo B. Kish, Editor(s)

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