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Proceedings Paper

Bilateral interdigital CPW phase shifter using BaSrTiO3 thin film on poly-Si/Si substrate for electronically steerable antenna architecture
Author(s): Hargsoon Yoon; K. J. Vinoy; Jose K. Abraham; Vijay K. Varadan
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Paper Abstract

In this paper the design and development of a planar phase shifter on poly-Si/high resistivity silicon is presented. A new bilateral interdigital coplanar waveguide (BI-CPW) configuration has been developed to get higher effective dielectric constant than normal CPW having same dimensions. This design makes use of BaSrTiO3 thin film effectively. A new process flow has been developed to enable full compatibility with emerging SiGe/Si technology. Another important feature of this design is the inclusion of a poly-Si layer for lowering operation voltage.

Paper Details

Date Published: 22 July 2003
PDF: 9 pages
Proc. SPIE 5055, Smart Structures and Materials 2003: Smart Electronics, MEMS, BioMEMS, and Nanotechnology, (22 July 2003); doi: 10.1117/12.497436
Show Author Affiliations
Hargsoon Yoon, The Pennsylvania State Univ. (United States)
K. J. Vinoy, The Pennsylvania State Univ. (United States)
Jose K. Abraham, The Pennsylvania State Univ. (United States)
Vijay K. Varadan, The Pennsylvania State Univ. (United States)


Published in SPIE Proceedings Vol. 5055:
Smart Structures and Materials 2003: Smart Electronics, MEMS, BioMEMS, and Nanotechnology
Vijay K. Varadan; Laszlo B. Kish, Editor(s)

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