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Proceedings Paper

Quantitative Nomarski microscope for roughness measurements on smooth surfaces
Author(s): Helmut H. Toebben; Gabriele A. Ringel; Dirk-Roger Schmitt
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Date Published:
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Proc. SPIE 4449, Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries II, ; doi: 10.1117/12.496766
Show Author Affiliations
Helmut H. Toebben, DLR (Germany)
Gabriele A. Ringel, DLR (Germany)
Dirk-Roger Schmitt, DLR (Germany)


Published in SPIE Proceedings Vol. 4449:
Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries II
Angela Duparre; Bhanwar Singh, Editor(s)

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