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Proceedings Paper

Model for statistically based advanced process control (APC) for the semiconductor industry
Author(s): David Gomez; Joel Mitchell
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Proc. SPIE 4405, Process and Equipment Control in Microelectronic Manufacturing II, ; doi: 10.1117/12.496678
Show Author Affiliations
David Gomez, Motorola (United States)
Joel Mitchell, Motorola (United States)


Published in SPIE Proceedings Vol. 4405:
Process and Equipment Control in Microelectronic Manufacturing II

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