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Proceedings Paper

MEMS reliability alliance characterizes foundries using micro/nano technology visualization (MNTV) for model validation
Author(s): Russell A. Lawton; Ingrid De Wolf
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Proc. SPIE 4407, MEMS Design, Fabrication, Characterization, and Packaging, ; doi: 10.1117/12.496669
Show Author Affiliations
Russell A. Lawton, Jet Propulsion Lab. (United States)
Ingrid De Wolf, IMEC (Belgium)


Published in SPIE Proceedings Vol. 4407:
MEMS Design, Fabrication, Characterization, and Packaging

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