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Creation of masking layers between elements of a complex construction
Author(s): Dmitrii S. Anikonov; Vasily G. Nazarov
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Proc. SPIE 4407, MEMS Design, Fabrication, Characterization, and Packaging, ; doi: 10.1117/12.496661
Show Author Affiliations
Dmitrii S. Anikonov, Institute of Applied Mathematics (Russia)
Vasily G. Nazarov, Institute of Applied Mathematics (Russia)


Published in SPIE Proceedings Vol. 4407:
MEMS Design, Fabrication, Characterization, and Packaging

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