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Proceedings Paper

Optical property and microstructure evaluation of the thin germanium nitride film
Author(s): Tun-Ying Fang; Ming Jen Deng; Yung Chin Wang; Mei-Rurng Tseng; Song Yeu Tsai
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Proc. SPIE 4416, Optical Engineering for Sensing and Nanotechnology (ICOSN 2001), ; doi: 10.1117/12.496637
Show Author Affiliations
Tun-Ying Fang, Industrial Technology Research Institute (Taiwan)
Ming Jen Deng, Industrial Technology Research Institute (Taiwan)
Yung Chin Wang, Industrial Technology Research Institute (Taiwan)
Mei-Rurng Tseng, Industrial Technology Research Institute (Taiwan)
Song Yeu Tsai, Industrial Technology Research Institute (Taiwan)


Published in SPIE Proceedings Vol. 4416:
Optical Engineering for Sensing and Nanotechnology (ICOSN 2001)

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