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Proceedings Paper

Characterization and homogenization of a 193 nm excimer laser beam for dose meter calibration
Author(s): Richard D. Jones; Holger Laabs; Marla L. Dowell
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Date Published:
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Proc. SPIE 4270, Laser Resonators IV, ; doi: 10.1117/12.495322
Show Author Affiliations
Richard D. Jones, National Institute of Standards and Technology (United States)
Holger Laabs, National Institute of Standards and Technology (United States)
Marla L. Dowell, National Institute of Standards and Technology (United States)


Published in SPIE Proceedings Vol. 4270:
Laser Resonators IV
Alexis V. Kudryashov; Alan H. Paxton, Editor(s)

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