Share Email Print
cover

Proceedings Paper

Laser processing in the microelectronics industry
Author(s): Willem Hoving; Johan Bosman; Hans den Boer
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Details

Date Published:
PDF
Proc. SPIE 4274, Laser Applications in Microelectronic and Optoelectronic Manufacturing VI, ; doi: 10.1117/12.495275
Show Author Affiliations
Willem Hoving, Philips Ctr. for Industrial Technology (Netherlands)
Johan Bosman, Philips Ctr. for Industrial Technology (Netherlands)
Hans den Boer, Philips Ctr. for Industrial Technology (Netherlands)


Published in SPIE Proceedings Vol. 4274:
Laser Applications in Microelectronic and Optoelectronic Manufacturing VI
Malcolm C. Gower; Henry Helvajian; Koji Sugioka; Jan J. Dubowski, Editor(s)

© SPIE. Terms of Use
Back to Top