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Proceedings Paper

Precision laser photopolymerization for 3D microfabrication
Author(s): Sergei A. Akhmanov; Alexander V. Evseev; M. M. Novikov; Vladislav Ya. Panchenko; Yury K. Nizienko; V. A. Mishenko; Alexandr I. Zakharchenko
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Proc. SPIE 4274, Laser Applications in Microelectronic and Optoelectronic Manufacturing VI, ; doi: 10.1117/12.495274
Show Author Affiliations
Sergei A. Akhmanov, Scientific Research Ctr. for Technological Lasers (Russia)
Alexander V. Evseev, Scientific Research Ctr. for Technological Lasers (Russia)
M. M. Novikov, Scientific Research Ctr. for Technological Lasers (Russia)
Vladislav Ya. Panchenko, Scientific Research Ctr. for Technological Lasers (Russia)
Yury K. Nizienko, TRINITI (Russia)
V. A. Mishenko, TRINITI (Russia)
Alexandr I. Zakharchenko, TRINITI (Russia)


Published in SPIE Proceedings Vol. 4274:
Laser Applications in Microelectronic and Optoelectronic Manufacturing VI
Malcolm C. Gower; Henry Helvajian; Koji Sugioka; Jan J. Dubowski, Editor(s)

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