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Proceedings Paper

Design of a MEMS pressure sensor for acoustic applications
Author(s): Rudra Pratap; Yash K. Dungerpuria
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Paper Details

Date Published:
Proc. SPIE 4236, Smart Electronics and MEMS II, ; doi: 10.1117/12.494941
Show Author Affiliations
Rudra Pratap, Indian Institute of Science (India)
Yash K. Dungerpuria, Indian Institute of Science (India)

Published in SPIE Proceedings Vol. 4236:
Smart Electronics and MEMS II
Derek Abbott; Vijay K. Varadan; Karl F. Boehringer, Editor(s)

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