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Proceedings Paper

Study of TEM micrographs of thin-film cross-section replica using spectral analysis
Author(s): Ting Mei; Xu Liu; Jinfa Tang; Peifu Gu
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Paper Abstract

The method of spectral analysis for studying the TEM micrograph of thin film replicas is presented. It has been proved that there are spectral losses in the TEM micrograph, which are concerned with the thickness of the replica. A TEM micrograph of the thin film cross section replica is studied with the aid of a computer.

Paper Details

Date Published: 1 December 1991
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Proc. SPIE 1554, Second International Conference on Photomechanics and Speckle Metrology, (1 December 1991); doi: 10.1117/12.49494
Show Author Affiliations
Ting Mei, Zhejiang Univ. (China)
Xu Liu, Zhejiang Univ. (China)
Jinfa Tang, Zhejiang Univ. (China)
Peifu Gu, Zhejiang Univ. (China)


Published in SPIE Proceedings Vol. 1554:
Second International Conference on Photomechanics and Speckle Metrology
Fu-Pen Chiang; Fu-Pen Chiang, Editor(s)

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