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Proceedings Paper

Analysis of thin-film losses from guided wave attenuations with photothermal deflection technique
Author(s): Xu Liu; Jinfa Tang; Emile P. Pelletier
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Paper Abstract

The loss of thin films is one of the critical parameters that limit the performances of optical thin film devices. Photothermal deflection technique has been used to measure the attenuation coefficients of the different modes in thin film guiding layers. Due to the high sensitivity of the attenuations of guided modes to the imperfaction factors of thin film, a new method is proposed to analyze the loss mechanisms of the thin film samples on separating the absorption and scattering losses. The experimental results are given, and the anealing process of thin film is also studied with this method.

Paper Details

Date Published: 1 December 1991
Proc. SPIE 1554, Second International Conference on Photomechanics and Speckle Metrology, (1 December 1991); doi: 10.1117/12.49493
Show Author Affiliations
Xu Liu, Zhejiang Univ. (China)
Jinfa Tang, Zhejiang Univ. (China)
Emile P. Pelletier, Univ. Saint Jerome (France)

Published in SPIE Proceedings Vol. 1554:
Second International Conference on Photomechanics and Speckle Metrology
Fu-Pen Chiang; Fu-Pen Chiang, Editor(s)

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