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Proceedings Paper

Novel approaches for the design of high aspect ratio microstructures: a work flow for LIGA mask fabrication
Author(s): Andreas Schmidt; Guenter Reuter; Gerhard Himmelsbach; Igor Bubel; Hans Hartmann
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Proc. SPIE 4175, Materials and Device Characterization in Micromachining III, ; doi: 10.1117/12.494608
Show Author Affiliations
Andreas Schmidt, Institut fuer Mikrotechnik Mainz GmbH (Germany)
Guenter Reuter, Institut fuer Mikrotechnik Mainz GmbH (Germany)
Gerhard Himmelsbach, Institut fuer Mikrotechnik Mainz GmbH (Germany)
Igor Bubel, aiss GmbH (Germany)
Hans Hartmann, aiss GmbH (Germany)


Published in SPIE Proceedings Vol. 4175:
Materials and Device Characterization in Micromachining III
Yuli Vladimirsky; Philip J. Coane, Editor(s)

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