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Proceedings Paper

KLA-Tencor 570 DUV inspection system for advanced reticles
Author(s): Paul Terbeek
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Date Published:
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Proc. SPIE 4186, 20th Annual BACUS Symposium on Photomask Technology, ; doi: 10.1117/12.494546
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Paul Terbeek, KLA-Tencor Corp. (United States)


Published in SPIE Proceedings Vol. 4186:
20th Annual BACUS Symposium on Photomask Technology
Brian J. Grenon; Giang T. Dao, Editor(s)

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