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Proceedings Paper

Error transfer function for grating interferometer
Author(s): De-Fu Hao
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Paper Abstract

An interferometer consisting of a reflective diffraction grating, a beam splitter, and an incandescent lamp can be used for fine displacement measurements. For analyzing how grating ruling errors influence the interferometer's precision, the paper presents an error transfer function. The transfer function disperses the accidental ruling errors so the equi-spaced interference fringes can get by the interferometer. The fringe signal equi-spaced errors are about 10 -2 nm in theory.

Paper Details

Date Published: 1 October 1991
PDF: 5 pages
Proc. SPIE 1545, International Conference on the Application and Theory of Periodic Structures, (1 October 1991); doi: 10.1117/12.49424
Show Author Affiliations
De-Fu Hao, Changchun Institute of Optics and Fine Mechanics (China)

Published in SPIE Proceedings Vol. 1545:
International Conference on the Application and Theory of Periodic Structures
Jeremy M. Lerner; Wayne R. McKinney, Editor(s)

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