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Proceedings Paper

Novel method to fabricate corrugation for distributed-feedback lasers using a grating photomask
Author(s): Makoto O. Okai; Tatsuo Harada
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Paper Abstract

A novel method is developed to fabricate varied line-space corrugations to improve the characteristics of distributed feedback (DFB) semiconductor lasers. Mechanically ruled grating patterns are transferred photolithographically to the surface of a semiconductor substrate by a contact mask aliner using the ultraviolet radiation of a He-Cd laser as a light source. The resultant varied line-space corrugation, like (lambda) /4-shift and corrugation-pitch modulation, improves the characteristics of distributed feedback lasers

Paper Details

Date Published: 1 October 1991
PDF: 7 pages
Proc. SPIE 1545, International Conference on the Application and Theory of Periodic Structures, (1 October 1991); doi: 10.1117/12.49419
Show Author Affiliations
Makoto O. Okai, Hitachi, Ltd. (Japan)
Tatsuo Harada, Hitachi, Ltd. (Japan)


Published in SPIE Proceedings Vol. 1545:
International Conference on the Application and Theory of Periodic Structures
Jeremy M. Lerner; Wayne R. McKinney, Editor(s)

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