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Proceedings Paper

Scatter properties of gratings at ultraviolet and visible wavelengths
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Paper Abstract

We show measurements of interorder scattered light from various grating surfaces. The measurements compare holographic and ruled gratings for in-plane and out-of-plane conditions at 254 nm and 633 nm.

Paper Details

Date Published: 1 October 1991
PDF: 7 pages
Proc. SPIE 1545, International Conference on the Application and Theory of Periodic Structures, (1 October 1991); doi: 10.1117/12.49413
Show Author Affiliations
John F. Hoose, Milton Roy Co. (United States)
Jeffrey L. Olson, Milton Roy Co. (United States)


Published in SPIE Proceedings Vol. 1545:
International Conference on the Application and Theory of Periodic Structures
Jeremy M. Lerner; Wayne R. McKinney, Editor(s)

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