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Proceedings Paper

Grating line shape characterization using scatterometry
Author(s): Kenneth P. Bishop; Susan M. Gaspar; Lisa-Michelle Milner; S. Sohail H. Naqvi; John Robert McNeil
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Paper Abstract

Identification of dimensional parameters of an arbitrarily shaped grating using scatter characteristics is presented. A rigorous diffraction model is used to predict the scatter from a known grating structure, and utilizing this information we perform the inverse problem of predicting line shape from a measurement of the scatter.

Paper Details

Date Published: 1 October 1991
PDF: 10 pages
Proc. SPIE 1545, International Conference on the Application and Theory of Periodic Structures, (1 October 1991); doi: 10.1117/12.49402
Show Author Affiliations
Kenneth P. Bishop, Univ. of New Mexico (United States)
Susan M. Gaspar, Univ. of New Mexico (United States)
Lisa-Michelle Milner, Univ. of New Mexico (United States)
S. Sohail H. Naqvi, Univ. of New Mexico (United States)
John Robert McNeil, Univ. of New Mexico (United States)


Published in SPIE Proceedings Vol. 1545:
International Conference on the Application and Theory of Periodic Structures
Jeremy M. Lerner; Wayne R. McKinney, Editor(s)

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