Share Email Print
cover

Proceedings Paper

Fabrication of microlenses by laser-assisted chemical etching
Author(s): Edward John Gratrix; Charles B. Zarowin
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

The laser assisted chemical etching technique (LACE) is capable of generating high quality aspheric microlenses, as well as other miniature components such as prisms and waveguides. Using a calculated intensity map it is possible to individually specify the optical properties of each element in the array. To date, arrays of high quality lenslets have been fabricated with specifications ranging from f/0.7 to f/10 with spacing of 50 to 300 (mu) . Microlenses have been generated in glass, silicon, CdTe and sapphire having 95 fill factors with figure quality better than 1/10th wave.

Paper Details

Date Published: 1 November 1991
PDF: 6 pages
Proc. SPIE 1544, Miniature and Micro-Optics: Fabrication and System Applications, (1 November 1991); doi: 10.1117/12.49396
Show Author Affiliations
Edward John Gratrix, Hughes Danbury Optical Systems, Inc. (United States)
Charles B. Zarowin, Hughes Danbury Optical Systems, Inc. (United States)


Published in SPIE Proceedings Vol. 1544:
Miniature and Micro-Optics: Fabrication and System Applications
Chandrasekhar Roychoudhuri; Wilfrid B. Veldkamp, Editor(s)

© SPIE. Terms of Use
Back to Top