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Proceedings Paper

Super-compact dual-axis optical scanning unit applying a tortional spring resonator driven by a piezoelectric actuator
Author(s): Hiroshi Goto; Koichi Imanaka
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Paper Details

Date Published: 1 November 1991
PDF: 10 pages
Proc. SPIE 1544, Miniature and Micro-Optics: Fabrication and System Applications, (1 November 1991); doi: 10.1117/12.49393
Show Author Affiliations
Hiroshi Goto, Omron Corp. (Japan)
Koichi Imanaka, Omron Corp. (Japan)


Published in SPIE Proceedings Vol. 1544:
Miniature and Micro-Optics: Fabrication and System Applications
Chandrasekhar Roychoudhuri; Wilfrid B. Veldkamp, Editor(s)

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