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Proceedings Paper

Performance and measurements of refractive microlens arrays
Author(s): Avi Y. Feldblum; Casimir R. Nijander; Wesley P. Townsend; Carlos M. Mayer-Costa
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Paper Abstract

Refractive microlens arrays with f numbers ranging from f/1 to f/5 have been fabricated using a melted photoresist technique. The photoresist surface profile has been accurately reproduced in the underlying SiO2 substrate using etching techniques. Surface profile and optical performance characteristics of these microlenses are reported. Spherical microlenses are shown to have nearly diffraction-limited performance.

Paper Details

Date Published: 1 November 1991
PDF: 9 pages
Proc. SPIE 1544, Miniature and Micro-Optics: Fabrication and System Applications, (1 November 1991); doi: 10.1117/12.49387
Show Author Affiliations
Avi Y. Feldblum, AT&T Bell Labs. (United States)
Casimir R. Nijander, AT&T Bell Labs. (United States)
Wesley P. Townsend, AT&T Bell Labs. (United States)
Carlos M. Mayer-Costa, New Jersey Institute of Technology (United States)

Published in SPIE Proceedings Vol. 1544:
Miniature and Micro-Optics: Fabrication and System Applications
Chandrasekhar Roychoudhuri; Wilfrid B. Veldkamp, Editor(s)

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