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Proceedings Paper

Microlens array for staring infrared imager
Author(s): Thomas R. Werner; J. Allen Cox; Steve Swanson; Michael Holz
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Paper Abstract

This paper describes the fabrication and testing of 64 X 96 arrays of microlenses used for fill-factor enhancement of uncooled infrared detector arrays. Each lenslet represents a f/0.9 Fresnel phase lens at 10 micrometers wavelength. All arrays were etched into silicon wafers as either 8-level or 16-level staircase kinoforms. When integrated with a detector array having 20 fill factor, these microlens arrays were capable of increasing the magnitude of the measured signal with f/2.2 fore-optics by 2.5-fold.

Paper Details

Date Published: 1 November 1991
PDF: 12 pages
Proc. SPIE 1544, Miniature and Micro-Optics: Fabrication and System Applications, (1 November 1991); doi: 10.1117/12.49372
Show Author Affiliations
Thomas R. Werner, Honeywell Systems and Research Ctr. (United States)
J. Allen Cox, Honeywell Systems and Research Ctr. (United States)
Steve Swanson, Honeywell Systems and Research Ctr. (United States)
Michael Holz, Lincoln Lab./MIT (United States)


Published in SPIE Proceedings Vol. 1544:
Miniature and Micro-Optics: Fabrication and System Applications
Chandrasekhar Roychoudhuri; Wilfrid B. Veldkamp, Editor(s)

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