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Proceedings Paper

Silicon microlenses for enhanced optical coupling to silicon focal planes
Author(s): M. Edward Motamedi; Marsden P. Griswold; Robert E. Knowlden
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Paper Details

Date Published: 1 November 1991
PDF: 11 pages
Proc. SPIE 1544, Miniature and Micro-Optics: Fabrication and System Applications, (1 November 1991); doi: 10.1117/12.49370
Show Author Affiliations
M. Edward Motamedi, Rockwell International Science Ctr. (United States)
Marsden P. Griswold, Lincoln Lab./MIT (United States)
Robert E. Knowlden, Lincoln Lab./MIT (United States)

Published in SPIE Proceedings Vol. 1544:
Miniature and Micro-Optics: Fabrication and System Applications
Chandrasekhar Roychoudhuri; Wilfrid B. Veldkamp, Editor(s)

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