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Proceedings Paper

Results achieved for multilayer mirror coatings on Set 2 optics for an alpha class extreme-ultraviolet lithography system
Author(s): James A. Folta; Regina Soufli; Courtney Davidson; Mark A. Schmidt; Claude Montcalm; R. Fred Grabner; Benjamin B Kaufmann; Eberhard Adolf Spiller
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Proc. SPIE 4506, Soft X-Ray and EUV Imaging Systems II, ; doi: 10.1117/12.492408
Show Author Affiliations
James A. Folta, Lawrence Livermore National Lab. (United States)
Regina Soufli, Lawrence Livermore National Lab. (United States)
Courtney Davidson, Lawrence Livermore National Lab. (United States)
Mark A. Schmidt, Lawrence Livermore National Lab. (United States)
Claude Montcalm, Lawrence Livermore National Lab. (United States)
R. Fred Grabner, Lawrence Livermore National Lab. (United States)
Benjamin B Kaufmann, Lawrence Livermore National Lab. (United States)
Eberhard Adolf Spiller, Lawrence Livermore National Lab. (United States)


Published in SPIE Proceedings Vol. 4506:
Soft X-Ray and EUV Imaging Systems II
Daniel A. Tichenor; James A. Folta, Editor(s)

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