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Proceedings Paper

Multilayer results and imaging performance of the Micro-Exposure Tool Set 1 optics
Author(s): Regina Soufli; Eberhard Adolf Spiller; Mark A. Schmidt; R. Fred Grabner; Eric M. Gullikson; Benjamin B Kaufmann; Layton C. Hale; Russell M. Hudyma; John S. Taylor
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Proc. SPIE 4506, Soft X-Ray and EUV Imaging Systems II, ; doi: 10.1117/12.492407
Show Author Affiliations
Regina Soufli, Lawrence Livermore National Lab. (United States)
Eberhard Adolf Spiller, Lawrence Livermore National Lab. (United States)
Mark A. Schmidt, Lawrence Livermore National Lab. (United States)
R. Fred Grabner, Lawrence Livermore National Lab. (United States)
Eric M. Gullikson, Lawrence Berkeley National Lab. (United States)
Benjamin B Kaufmann, Lawrence Livermore National Lab. (United States)
Layton C. Hale, Lawrence Livermore National Lab. (United States)
Russell M. Hudyma, Lawrence Livermore National Lab. (United States)
John S. Taylor, Lawrence Livermore National Lab. (United States)


Published in SPIE Proceedings Vol. 4506:
Soft X-Ray and EUV Imaging Systems II
Daniel A. Tichenor; James A. Folta, Editor(s)

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