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Proceedings Paper

Antireflection coatings of sputter-deposited SnOxFy and SnNxFy
Author(s): Zhiqiang Yin; B. A. Stjerna; Claes-Goeran Granqvist
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Paper Abstract

Films of SnOxFy and SnNxFy were made by reactive rf magnetron sputtering at rates up to on the order of magnitude 50 nm/min. They have refractive indices of on the order of magnitude 1.7 and are useful for antireflecting metal-oxide-coated substrates. Spectral optical data, showing the antireflection property, are given for SnOx/SnOxFy and SnOx/SnNxFy tandem layers.

Paper Details

Date Published: 1 December 1991
PDF: 9 pages
Proc. SPIE 1536, Optical Materials Technology for Energy Efficiency and Solar Energy Conversion X, (1 December 1991); doi: 10.1117/12.49220
Show Author Affiliations
Zhiqiang Yin, Chalmers Univ. of Technology and Univ. of Gothenburg (Sweden)
B. A. Stjerna, Chalmers Univ. of Technology and Univ. of Gothenburg (Sweden)
Claes-Goeran Granqvist, Chalmers Univ. of Technology and Univ. of Gothenburg (Sweden)


Published in SPIE Proceedings Vol. 1536:
Optical Materials Technology for Energy Efficiency and Solar Energy Conversion X
Carl M. Lampert; Claes G. Granqvist, Editor(s)

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