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Stress control of multilayer diaphragm structure and influence of substrate on residual stress in polysilicon
Author(s): Longqing Chen; Haiqing Gong; Jianmin Miao
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Proc. SPIE 4557, Micromachining and Microfabrication Process Technology VII, ; doi: 10.1117/12.491978
Show Author Affiliations
Longqing Chen, Nanyang Technological Univ. (Singapore)
Haiqing Gong, Nanyang Technological Univ. (Singapore)
Jianmin Miao, Nanyang Technological Univ. (Singapore)


Published in SPIE Proceedings Vol. 4557:
Micromachining and Microfabrication Process Technology VII
Jean Michel Karam; John A. Yasaitis, Editor(s)

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