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Proceedings Paper

Fabrication of a three-dimensional inductor coil using excimer laser micromachining
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Proc. SPIE 4592, Device and Process Technologies for MEMS and Microelectronics II, ; doi: 10.1117/12.491587
Show Author Affiliations
Karlo Jolic, Swinburne Univ. of Technology (Australia)
Muralihar K. Ghantasala, Swinburne Univ. of Technology (Australia)
Jason P. Hayes, Swinburne Univ. of Technology (Australia)
Robert Hobbs, Swinburne Univ. of Technology (Australia)
Erol C. Harvey, Swinburne Univ. of Technology (Australia)


Published in SPIE Proceedings Vol. 4592:
Device and Process Technologies for MEMS and Microelectronics II
Jung-Chih Chiao; Lorenzo Faraone; H. Barry Harrison; Andrei M. Shkel, Editor(s)

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