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Proceedings Paper

Charged particles emission from target surface at an early stage of femtosecond pulsed laser ablation
Author(s): Tomokazu Sano; Makoto Murai; Isamu Miyamoto
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Proc. SPIE 4637, Photon Processing in Microelectronics and Photonics, ; doi: 10.1117/12.491049
Show Author Affiliations
Tomokazu Sano, Osaka Univ. (Japan)
Makoto Murai, Osaka Univ. (Japan)
Isamu Miyamoto, Osaka Univ. (Japan)


Published in SPIE Proceedings Vol. 4637:
Photon Processing in Microelectronics and Photonics
Jan J. Dubowski; Willem Hoving; Koji Sugioka; Malcolm C. Gower; Richard F. Haglund; Alberto Pique; Frank Traeger; Jan J. Dubowski; Willem Hoving, Editor(s)

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