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Proceedings Paper

One-step lithography for fabrication of hybrid microlens using coded gray-level mask
Author(s): Jun Yao; Yixiao Zhang; Yangsu Zeng; Jinglei Du; Yongkang Guo; Zheng Cui
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Proc. SPIE 4647, Functional Integration of Opto-Electro-Mechanical Devices and Systems II, ; doi: 10.1117/12.490950
Show Author Affiliations
Jun Yao, Sichuan Univ. (United Kingdom)
Yixiao Zhang, Sichuan Univ. (China)
Yangsu Zeng, Sichuan Univ. (China)
Jinglei Du, Sichuan Univ. (China)
Yongkang Guo, Sichuan Univ. (China)
Zheng Cui, Rutherford Appleton Lab. (United Kingdom)


Published in SPIE Proceedings Vol. 4647:
Functional Integration of Opto-Electro-Mechanical Devices and Systems II
Michael R. Descour; Juha T. Rantala, Editor(s)

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