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Proceedings Paper

Holographic optical profilometer
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Paper Abstract

We present a novel non-contact holographic optical profilometer, which is light weight, compact and relatively simpler. Computer simulation results reveal that surface measurements with sub-micron resolution are possible both in the horizontal and vertical directions.

Paper Details

Date Published: 1 April 1991
PDF: 6 pages
Proc. SPIE 1442, 7th Mtg in Israel on Optical Engineering, (1 April 1991); doi: 10.1117/12.49077
Show Author Affiliations
Erez Hasman, Weizmann Institute of Science (Israel)
Nir Davidson, Weizmann Institute of Science (Israel)
Asher A. Friesem, Weizmann Institute of Science (Israel)

Published in SPIE Proceedings Vol. 1442:
7th Mtg in Israel on Optical Engineering

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