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Proceedings Paper

Quantum efficiency and crosstalk of an improved backside-illuminated indium antimonide focal plane array
Author(s): Ilam Bloom; Yael Nemirovsky
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Paper Abstract

The quantum efficiency and crosstalk of backside illuminated indium antimonide photodiodes in hybrid focal plane arrays are calculated. An improved structure with crosswise ohmic contacts at the backside of the thinned InSb substrate is described. The simulations predict a significant reduction in the crosstalk while retaining high quantum efficiency. High quality InSb PV detector arrays and test devices were fabricated. The process includes lithography on both sides, etch thinning technique and highly controlled passivation on each side for optimum performance. The measurements show good agreement with calculations and indicate that there is no degradation due to fabrication. This study demonstrates the feasability of an improved hybrid staring FPA combining backside illuminated 2D PV detectors in thinned InSb coupled to a silicon processor.

Paper Details

Date Published: 1 April 1991
PDF: 12 pages
Proc. SPIE 1442, 7th Mtg in Israel on Optical Engineering, (1 April 1991); doi: 10.1117/12.49070
Show Author Affiliations
Ilam Bloom, Technion--Israel Institute of Technology (Israel)
Yael Nemirovsky, Technion--Israel Institute of Technology (Israel)


Published in SPIE Proceedings Vol. 1442:
7th Mtg in Israel on Optical Engineering

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