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Proceedings Paper

Results of a PTB-CXRO EUV reflectometry cross-calibration
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Paper Details

Date Published:
Proc. SPIE 4688, Emerging Lithographic Technologies VI, ; doi: 10.1117/12.490593
Show Author Affiliations
Eric M. Gullikson, Lawrence Berkeley National Lab. (United States)
Frank Scholze, Physikalisch-Technische Bundesanstalt (Germany)

Published in SPIE Proceedings Vol. 4688:
Emerging Lithographic Technologies VI
Roxann L. Engelstad, Editor(s)

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