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Proceedings Paper

Development of aerial image simulator based on efficient computation of transmission cross coefficient
Author(s): Sonny Y. Zinn; Seong-Woon Choi; Woo-Sung Han; Jung-Min Sohn
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Proc. SPIE 4691, Optical Microlithography XV, ; doi: 10.1117/12.490534
Show Author Affiliations
Sonny Y. Zinn, Samsung Electronics Co., Ltd. (South Korea)
Seong-Woon Choi, Samsung Electronics Co., Ltd. (South Korea)
Woo-Sung Han, Samsung Electronics Co., Ltd. (South Korea)
Jung-Min Sohn, Samsung Electronics Co., Ltd. (South Korea)


Published in SPIE Proceedings Vol. 4691:
Optical Microlithography XV
Anthony Yen, Editor(s)

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