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Proceedings Paper

Kumakhov optics use in reflectometry
Author(s): Nariman S. Ibraimov; Anatoly V. Mozhayev; Ekaterina V. Likhushina; Oleg V. Mikhin
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Paper Abstract

An x-ray reflectometer has been developed based on Kumakhov's optics for roughness contorl fo polished surfaces and thin-film analysis for microelectronics applications. The half-lens used enables production of spatially collimated quasi-parallel x-ray required for the method, considerable decrease of the device's dimensions and x-ray power compared to existing models. The ability of Kumakhov's half-lenses to raise x-ray quanta density makes it possible to raise significantly the reflectometer's luminosity and reflectivity while reducing hte background.

Paper Details

Date Published: 30 July 2002
PDF: 4 pages
Proc. SPIE 4765, International Conference on X-ray and Neutron Capillary Optics, (30 July 2002); doi: 10.1117/12.489757
Show Author Affiliations
Nariman S. Ibraimov, Institute for Roentgen Optics (Russia)
Anatoly V. Mozhayev, Institute for Roentgen Optics (Russia)
Ekaterina V. Likhushina, Institute for Roentgen Optics (Russia)
Oleg V. Mikhin, Institute for Roentgen Optics (Russia)

Published in SPIE Proceedings Vol. 4765:
International Conference on X-ray and Neutron Capillary Optics
Muradin A. Kumakhov, Editor(s)

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