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Proceedings Paper

Low-temperature in-situ dry cleaning process for epitaxial layer multiprocessing
Author(s): Mehrdad M. Moslehi
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Paper Details

Date Published: 1 April 1991
PDF: 19 pages
Proc. SPIE 1393, Rapid Thermal and Related Processing Techniques, (1 April 1991); doi: 10.1117/12.48969
Show Author Affiliations
Mehrdad M. Moslehi, Texas Instruments Inc. (United States)


Published in SPIE Proceedings Vol. 1393:
Rapid Thermal and Related Processing Techniques
Rajendra Singh; Mehrdad M. Moslehi, Editor(s)

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