Share Email Print

Proceedings Paper

Variability in thickness measurements using x-ray fluorescence technique
Author(s): Inmaculada C. Baltazar; Manolo G. Mena
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Details

Date Published: 1 March 1991
PDF: 11 pages
Proc. SPIE 1392, Advanced Techniques for Integrated Circuit Processing, (1 March 1991); doi: 10.1117/12.48959
Show Author Affiliations
Inmaculada C. Baltazar, Intel Philippines Manufacturing Co. (Philippines)
Manolo G. Mena, Intel Philippines Manufacturing Co. (Philippines)

Published in SPIE Proceedings Vol. 1392:
Advanced Techniques for Integrated Circuit Processing
James A. Bondur; Terry R. Turner, Editor(s)

© SPIE. Terms of Use
Back to Top