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Proceedings Paper

Variability in thickness measurements using x-ray fluorescence technique
Author(s): Inmaculada C. Baltazar; Manolo G. Mena
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Paper Details

Date Published: 1 March 1991
PDF: 11 pages
Proc. SPIE 1392, Advanced Techniques for Integrated Circuit Processing, (1 March 1991); doi: 10.1117/12.48959
Show Author Affiliations
Inmaculada C. Baltazar, Intel Philippines Manufacturing Co. (Philippines)
Manolo G. Mena, Intel Philippines Manufacturing Co. (Philippines)

Published in SPIE Proceedings Vol. 1392:
Advanced Techniques for Integrated Circuit Processing
James A. Bondur; Terry R. Turner, Editor(s)

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