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Proceedings Paper

Laser processing of germanium
Author(s): Valentin Craciun; Ion N. Mihailescu; Armando Luches; S. G. Kiyak; G. N. Mikhailova
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Paper Details

Date Published: 1 March 1991
PDF: 6 pages
Proc. SPIE 1392, Advanced Techniques for Integrated Circuit Processing, (1 March 1991); doi: 10.1117/12.48954
Show Author Affiliations
Valentin Craciun, Institute of Atomic Physics (Romania)
Ion N. Mihailescu, Institute of Atomic Physics (Romania)
Armando Luches, Univ. di Lecce (Italy)
S. G. Kiyak, Institute of General Physics (Russia)
G. N. Mikhailova, Institute of General Physics (Russia)

Published in SPIE Proceedings Vol. 1392:
Advanced Techniques for Integrated Circuit Processing
James A. Bondur; Terry R. Turner, Editor(s)

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