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Proceedings Paper

Formation of heterostructure devices in a multichamber processing environment with in-vacuo surface analysis diagnostics and in-situ process monitoring
Author(s): Gerald Lucovsky; Sang S. Kim; J. T. Fitch; Cheng Wang
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Paper Details

Date Published: 1 March 1991
PDF: 12 pages
Proc. SPIE 1392, Advanced Techniques for Integrated Circuit Processing, (1 March 1991); doi: 10.1117/12.48950
Show Author Affiliations
Gerald Lucovsky, North Carolina State Univ. (United States)
Sang S. Kim, North Carolina State Univ. (United States)
J. T. Fitch, North Carolina State Univ. (United States)
Cheng Wang, North Carolina State Univ. (United States)


Published in SPIE Proceedings Vol. 1392:
Advanced Techniques for Integrated Circuit Processing
James A. Bondur; Terry R. Turner, Editor(s)

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