Share Email Print
cover

Proceedings Paper

In-situ film thickness measurements using acoustic techniques
Author(s): Sanjay Bhardwaj; Butrus T. Khuri-Yakub
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Details

Date Published: 1 March 1991
PDF: 8 pages
Proc. SPIE 1392, Advanced Techniques for Integrated Circuit Processing, (1 March 1991); doi: 10.1117/12.48949
Show Author Affiliations
Sanjay Bhardwaj, Stanford Univ. (United States)
Butrus T. Khuri-Yakub, Stanford Univ. (United States)


Published in SPIE Proceedings Vol. 1392:
Advanced Techniques for Integrated Circuit Processing
James A. Bondur; Terry R. Turner, Editor(s)

© SPIE. Terms of Use
Back to Top