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Proceedings Paper

Etch tailoring through flexible end-point detection
Author(s): David Angell; Gottleib S. Oehrlein
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Paper Details

Date Published: 1 March 1991
PDF: 8 pages
Proc. SPIE 1392, Advanced Techniques for Integrated Circuit Processing, (1 March 1991); doi: 10.1117/12.48947
Show Author Affiliations
David Angell, IBM/Thomas J. Watson Research Ctr. (United States)
Gottleib S. Oehrlein, IBM/Thomas J. Watson Research Ctr. (United States)


Published in SPIE Proceedings Vol. 1392:
Advanced Techniques for Integrated Circuit Processing
James A. Bondur; Terry R. Turner, Editor(s)

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