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Proceedings Paper

Theoretical and practical aspects of real-time Fourier imaging
Author(s): Dennis S. Grimard; Fred Lewis Terry Jr.; Michael E. Elta
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Paper Abstract

This paper reports the theoretical and experimental sensitivity of Fourier imaging (Fl) and the Fourier imaging system (FIS)'' respectively. The theory based on scalar diffraction which specifies these sensitivities is presented and discussed. Specifically the theoretical sensitivity of the Fl technique at a wavelength of 633 nm is determined to be 0. 003 nm while the experimental sensitivity of the FIS is approximately 15 nm. Both of these figures utilize a one-dimensional 1-pm rectangular diffraction structure for their calculation.

Paper Details

Date Published: 1 March 1991
PDF: 8 pages
Proc. SPIE 1392, Advanced Techniques for Integrated Circuit Processing, (1 March 1991); doi: 10.1117/12.48946
Show Author Affiliations
Dennis S. Grimard, Univ. of Michigan (United States)
Fred Lewis Terry Jr., Univ. of Michigan (United States)
Michael E. Elta, Univ. of Michigan (United States)

Published in SPIE Proceedings Vol. 1392:
Advanced Techniques for Integrated Circuit Processing
James A. Bondur; Terry R. Turner, Editor(s)

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