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Proceedings Paper

Process control sensor development for the automation of single-wafer processors
Author(s): Jimmy W. Hosch
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Paper Abstract

A review of the progress in the selection and development of appropriate process control sensors for single wafer processor automation will be presented. Categories of sensors will be defmed and their use in process control described. Issues surrounding the development of key sensors will be discussed.

Paper Details

Date Published: 1 March 1991
PDF: 6 pages
Proc. SPIE 1392, Advanced Techniques for Integrated Circuit Processing, (1 March 1991); doi: 10.1117/12.48945
Show Author Affiliations
Jimmy W. Hosch, Texas Instruments Inc. (United States)


Published in SPIE Proceedings Vol. 1392:
Advanced Techniques for Integrated Circuit Processing
James A. Bondur; Terry R. Turner, Editor(s)

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