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Proceedings Paper

Electrical probe diagnostics for processing discharges
Author(s): Thomas D. Mantei
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Paper Abstract

This paper is intended to provide an overview of Langmuir probe diagnostics for process plasmas. The discussion will focus on plane and cylindrical single current collecting probes. Methods will be presented for the determination of the plasma potential floating potential electron and ion densities electron temperature and electron energy distribution function. Common problems and pitfalls will also be discussed.

Paper Details

Date Published: 1 March 1991
PDF: 8 pages
Proc. SPIE 1392, Advanced Techniques for Integrated Circuit Processing, (1 March 1991); doi: 10.1117/12.48939
Show Author Affiliations
Thomas D. Mantei, Univ. of Cincinnati (United States)

Published in SPIE Proceedings Vol. 1392:
Advanced Techniques for Integrated Circuit Processing
James A. Bondur; Terry R. Turner, Editor(s)

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