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Proceedings Paper

Applications of optical emission spectroscopy in plasma manufacturing systems
Author(s): George G. Gifford
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Paper Details

Date Published: 1 March 1991
PDF: 12 pages
Proc. SPIE 1392, Advanced Techniques for Integrated Circuit Processing, (1 March 1991); doi: 10.1117/12.48938
Show Author Affiliations
George G. Gifford, IBM/East Fishkill Facility (United States)

Published in SPIE Proceedings Vol. 1392:
Advanced Techniques for Integrated Circuit Processing
James A. Bondur; Terry R. Turner, Editor(s)

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