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Proceedings Paper

Measurements on the NIST GEC reference cell
Author(s): James R. Roberts; James K. Olthoff; R. J. Van Brunt; James R. Whetstone
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Paper Details

Date Published: 1 March 1991
PDF: 9 pages
Proc. SPIE 1392, Advanced Techniques for Integrated Circuit Processing, (1 March 1991); doi: 10.1117/12.48936
Show Author Affiliations
James R. Roberts, National Institute of Standards and Technology (United States)
James K. Olthoff, National Institute of Standards and Technology (United States)
R. J. Van Brunt, National Institute of Standards and Technology (United States)
James R. Whetstone, National Institute of Standards and Technology (United States)


Published in SPIE Proceedings Vol. 1392:
Advanced Techniques for Integrated Circuit Processing
James A. Bondur; Terry R. Turner, Editor(s)

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