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Proceedings Paper

Effects of environmental and installation-specific factors on process gas delivery via mass-flow controller with an emphasis on real-time behavior
Author(s): David E. Gray; Neil M. P. Benjamin; Brian N. Chapman
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Paper Details

Date Published: 1 March 1991
PDF: 9 pages
Proc. SPIE 1392, Advanced Techniques for Integrated Circuit Processing, (1 March 1991); doi: 10.1117/12.48933
Show Author Affiliations
David E. Gray, Lucas/Signatone Corp. (United States)
Neil M. P. Benjamin, Lucas/Signatone Corp. (United States)
Brian N. Chapman, Lucas/Signatone Corp. (United States)

Published in SPIE Proceedings Vol. 1392:
Advanced Techniques for Integrated Circuit Processing
James A. Bondur; Terry R. Turner, Editor(s)

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