Share Email Print

Proceedings Paper

Effects of environmental and installation-specific factors on process gas delivery via mass-flow controller with an emphasis on real-time behavior
Author(s): David E. Gray; Neil M. P. Benjamin; Brian N. Chapman
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Details

Date Published: 1 March 1991
PDF: 9 pages
Proc. SPIE 1392, Advanced Techniques for Integrated Circuit Processing, (1 March 1991); doi: 10.1117/12.48933
Show Author Affiliations
David E. Gray, Lucas/Signatone Corp. (United States)
Neil M. P. Benjamin, Lucas/Signatone Corp. (United States)
Brian N. Chapman, Lucas/Signatone Corp. (United States)

Published in SPIE Proceedings Vol. 1392:
Advanced Techniques for Integrated Circuit Processing
James A. Bondur; Terry R. Turner, Editor(s)

© SPIE. Terms of Use
Back to Top